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Proceedings Paper

Silicon waferboard detector module for an optical heterodyne balanced receiver with integrated bypass capacitors
Author(s): Andrew Silletti; Marvin J. Tabasky; Paul M. Hill; Paul O. Haugsjaa; Michael Urban
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Paper Abstract

We describe the design, fabrication, and testing of a silicon waferboard dual-detector module used in an integrated optical heterodyne balanced receiver. This 'Silicon Waferboard' approach, as its name implies, substitutes a silicon substrate incorporating precision micromachined structures in lieu of conventional printed circuit boards and has been used for both optical transmitter and receiver fabrication. Our dual-detector receiver substrate incorporates orientation-dependent etched v-grooves for fiber placement in addition to metal/insulator/metal (MIM) bypass capacitors and high-speed photodetectors. Preliminary measurements indicated a receiver bandwidth potential of 14 GHz. The performance of the dual-detector receiver module as well as its individual components will be described.

Paper Details

Date Published: 6 April 1993
PDF: 6 pages
Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); doi: 10.1117/12.141923
Show Author Affiliations
Andrew Silletti, GTE Labs. Inc. (United States)
Marvin J. Tabasky, GTE Labs. Inc. (United States)
Paul M. Hill, GTE Labs. Inc. (United States)
Paul O. Haugsjaa, GTE Labs. Inc. (United States)
Michael Urban, GTE Labs. Inc. (United States)


Published in SPIE Proceedings Vol. 1794:
Integrated Optical Circuits II
Ka-Kha Wong, Editor(s)

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