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Proceedings Paper

Interferometric displacement sensor realized with a planar 3x3 directional coupler in glass
Author(s): Roland Fuest; Norbert Fabricius; Uwe Hollenbach; Barbara Wolf
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Paper Abstract

A miniature integrated optical Michelson interferometer in glass based on a 3 X 3 directional coupler for high precision displacement measuring is presented. The planar waveguide structure can be used simultaneously for beam splitting and generation of phase shifted interference signals. The latter are necessary for decoding the direction of motion and for interpolation procedures to increase resolution and accuracy. The basic process for fabricating the waveguides in the integrated optical chip is a double thermal ion exchange of silver and sodium in special glass BGG31. It allows to produce buried waveguides with low loss and modefield dimensions adjusted to standard silica fibers.

Paper Details

Date Published: 6 April 1993
PDF: 14 pages
Proc. SPIE 1794, Integrated Optical Circuits II, (6 April 1993); doi: 10.1117/12.141900
Show Author Affiliations
Roland Fuest, IOT Entwicklungsgesellschaft fuer Integrierte Optik-Technologie GmbH (Germany)
Norbert Fabricius, IOT Entwicklungsgesellschaft fuer Integrierte Optik-Technologie GmbH (Germany)
Uwe Hollenbach, IOT Entwicklungsgesellschaft fuer Integrierte Optik-Technologie GmbH (Germany)
Barbara Wolf, IOT Entwicklungsgesellschaft fuer Integrierte Optik-Technologie GmbH (Germany)


Published in SPIE Proceedings Vol. 1794:
Integrated Optical Circuits II
Ka-Kha Wong, Editor(s)

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