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Proceedings Paper

Design review of a unique out-of-plane polarimetric scatterometer
Author(s): Tod F. Schiff; John C. Stover; Daniel J. Wilson; Brett D. Swimley; Mark E. Southwood; Donald R. Bjork
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Paper Abstract

This paper reviews a scatterometer which is capable of measuring scatter throughout most of the sphere surrounding the sample. The instrument can be configured to operate at many different laser wavelengths, or with a broadband source, at virtually any angle of incidence. Automated polarization control of both source and receiver has been accomplished, which allows calculation of incident and scattered Stokes vectors as well as the Mueller matrix associated with either reflective or transmissive samples. This paper forms the background material for the two papers that follow it in this proceeding.

Paper Details

Date Published: 12 February 1993
PDF: 7 pages
Proc. SPIE 1753, Stray Radiation in Optical Systems II, (12 February 1993); doi: 10.1117/12.141440
Show Author Affiliations
Tod F. Schiff, TMA Technologies, Inc. (United States)
John C. Stover, TMA Technologies, Inc. (United States)
Daniel J. Wilson, TMA Technologies, Inc. (United States)
Brett D. Swimley, TMA Technologies, Inc. (United States)
Mark E. Southwood, TMA Technologies, Inc. (United States)
Donald R. Bjork, TMA Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 1753:
Stray Radiation in Optical Systems II
Robert P. Breault, Editor(s)

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