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Proceedings Paper

Design review of a broadband three-dimensional scatterometer
Author(s): Fredrick M. Cady; Mary W. Knighton; Daniel R. Cheever; Brett D. Swimley; Theodore L. Hundtoft; Tod F. Schiff; Mark E. Southwood
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Paper Abstract

A design review of a broadband, full reflection hemispherical Bidirectional Scatter Distribution Function (BSDF) instrument is given. Monochromator-based and Fourier Transform Spectrometer-based (FTS) sources are described. The goniometer design shown allows the measurement of full reflection hemisphere scatter with transmission measurements possible.

Paper Details

Date Published: 12 February 1993
PDF: 10 pages
Proc. SPIE 1753, Stray Radiation in Optical Systems II, (12 February 1993); doi: 10.1117/12.141438
Show Author Affiliations
Fredrick M. Cady, TMA Technologies, Inc. (United States)
Mary W. Knighton, TMA Technologies, Inc. (United States)
Daniel R. Cheever, TMA Technologies, Inc. (United States)
Brett D. Swimley, TMA Technologies, Inc. (United States)
Theodore L. Hundtoft, TMA Technologies, Inc. (United States)
Tod F. Schiff, TMA Technologies, Inc. (United States)
Mark E. Southwood, TMA Technologies, Inc. (United States)

Published in SPIE Proceedings Vol. 1753:
Stray Radiation in Optical Systems II
Robert P. Breault, Editor(s)

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