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Proceedings Paper

Critical materials issues in the performance and manufacturability of LiNbO3 integrated optics
Author(s): Leon McCaughan
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Paper Abstract

LiNb03 integrated optics is a sufficiently mature technology that several devices are close to commercial realization. These include high speed modulators, switch arrays, and optical circuitry for the fiber gyroscope and for optical time domain reflectometry. Although the physical principles which underlie the operation of these devices are well understood, predictable and reproducible performance is often difficult to achieve and maintain. This is due to an absence of a detailed understanding of the materials science of LiNb03 and of the processes associated with integrated optics device fabrication. In this presentation I focus on the materials issues which affect the performance, yield, and the design predictability of these devices.

Paper Details

Date Published: 28 January 1993
PDF: 29 pages
Proc. SPIE 10267, Integrated Optics and Optoelectronics: A Critical Review, 1026708 (28 January 1993); doi: 10.1117/12.141417
Show Author Affiliations
Leon McCaughan, Univ. of Wisconsin, Madison (United States)

Published in SPIE Proceedings Vol. 10267:
Integrated Optics and Optoelectronics: A Critical Review
Ka Kha Wong; Manijeh Razeghi, Editor(s)

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