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Proceedings Paper

Dynamic aiming workpiece edge utilizing differential fiber sensor in on-line measuring system
Author(s): Chunhe Wang; Shenghua Ye
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Paper Abstract

A differential fiber sensor is used as an aiming device in on-line measuring size of the workplace. It can be employed as a tracker in admeasuring micro-displacement of a specimen edge as well. The homodyne detection has been implemented by a closed loop system made up with microcomputer, right-angle prism and PZT. The experimental standard deviation of aiming the edge is confirmed to be within 0.1 micrometers .

Paper Details

Date Published: 5 March 1993
PDF: 5 pages
Proc. SPIE 1795, Fiber Optic and Laser Sensors X, (5 March 1993); doi: 10.1117/12.141262
Show Author Affiliations
Chunhe Wang, Tianjin Univ. (China)
Shenghua Ye, Tianjin Univ. (China)

Published in SPIE Proceedings Vol. 1795:
Fiber Optic and Laser Sensors X
Eric Udd; Ramon P. DePaula, Editor(s)

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