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Proceedings Paper

Fabrication of a silicon Mach-Zehnder interferometer for mechanical measurands
Author(s): Arokia Nathan; Yash Bhatnagar; Ashok Vadekar; Wei-Ping Huang
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Paper Abstract

We present an integrated Si micromechanical Mach-Zehnder interferometer based on the ARROW structure. The interferometer has its reference arm supported by the Si substrate and the sensing arm is suspended over a cavity realized using Si surface micromachining techniques. An applied pressure causes deflection of the suspended arm resulting in optical path elongation and hence in an optical phase shift with respect to the reference. The design of the interferometer was based on simulations of the photonic transport in the ARROW for the different geometric parameters. Silicon integrated circuit technology was employed for the interferometer fabrication i.e. low temperature CVD oxide for the core and second cladding and LPCVD poly for the first cladding layer. Prior to surface micromachining, the composite waveguide structure was annealed so as to minimize the residual stress and hence the sag in the free standing sensing arm.

Paper Details

Date Published: 2 March 1993
PDF: 8 pages
Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141226
Show Author Affiliations
Arokia Nathan, Univ. of Waterloo (Canada)
Yash Bhatnagar, Univ. of Waterloo (Canada)
Ashok Vadekar, Univ. of Waterloo (Canada)
Wei-Ping Huang, Univ. of Waterloo (Canada)

Published in SPIE Proceedings Vol. 1793:
Integrated Optics and Microstructures
Massood Tabib-Azar; Dennis L. Polla, Editor(s)

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