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Proceedings Paper

Electrostatically actuated integrated optical nanomechanical devices
Author(s): Paul Pliska; Walter Lukosz
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Paper Abstract

We demonstrated that active integrated optical (IO) devices based on the IO nanomechanical effect can be actuated by electrostatic forces. In particular, we demonstrated: (1) an intensity modulator, (2) the deflection, and (3) the focusing and defocusing of a guided wave in a planar waveguide.

Paper Details

Date Published: 2 March 1993
PDF: 14 pages
Proc. SPIE 1793, Integrated Optics and Microstructures, (2 March 1993); doi: 10.1117/12.141224
Show Author Affiliations
Paul Pliska, Swiss Federal Institute of Technology (Switzerland)
Walter Lukosz, Swiss Federal Institute of Technology (Switzerland)


Published in SPIE Proceedings Vol. 1793:
Integrated Optics and Microstructures
Massood Tabib-Azar; Dennis L. Polla, Editor(s)

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