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Proceedings Paper

Dielectric and metal coatings for excimer laser optics
Author(s): Nikolay V. Morozov; Spartak I. Sagitov; P. B. Sergeyev
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Paper Abstract

This article reviews the experimental works dedicated to the development of mirrors and antireflecting coatings for the UVspectrum range carried out in the Quantum Radiophysics Division of P.N Lebedev Physical Institute, Russian Academy of Sciences The methods of obtaining the single-layer anl multilayer optical coatings are given. The effect of the optical coating construction as well as various technological factors of coating process on damage threshold and chemical stability of mirrors is investigated

Paper Details

Date Published: 4 March 1993
PDF: 10 pages
Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141044
Show Author Affiliations
Nikolay V. Morozov, P.N. Lebedev Physical Institute (Russia)
Spartak I. Sagitov, P.N. Lebedev Physical Institute (Russia)
P. B. Sergeyev, P.N. Lebedev Physical Institute (Russia)

Published in SPIE Proceedings Vol. 1782:
Thin Films for Optical Systems
Karl H. Guenther, Editor(s)

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