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Proceedings Paper

Amount of information contained in data of ellipsometric measurements
Author(s): Kirill M. Kuzanyan
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Paper Abstract

Determination of optical constants of thin films on thick substrates is discussed. The level of information contained in ellipsometric measurements is investigated. The parameters of the most important contribution to the ellipsometric data are selected. An attempt to explain the difficulties of solution of the inverse problem in ellipsometry is carried out.

Paper Details

Date Published: 4 March 1993
PDF: 10 pages
Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141040
Show Author Affiliations
Kirill M. Kuzanyan, Moscow State Univ. (Russia)

Published in SPIE Proceedings Vol. 1782:
Thin Films for Optical Systems
Karl H. Guenther, Editor(s)

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