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Proceedings Paper

Ion-beam sputter deposition techniques for the production of optical coatings of the highest quality
Author(s): Timothy W. Jolly; Ramin Lalezari
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Paper Abstract

Continued development of multi-layer dielectric mirrors for applications such as laser gyroscopes shows that the highest quality of optical coatings is still produced by using ion beam sputter deposition. In this technique, a broad-beam ion source is used to sputter coating material off a metallic or dielectric target onto the substrates. Dielectric mirrors with total losses of < 40 ppm are now easy to achieve, and figures below 2 ppm can be managed. These coatings are also used for high power laser mirrors, but are only just starting to be used for other more general applications. In this paper we explain the principles of the technique, and describe the aspects of system design that we have evolved to make these coatings commercially available. We describe the results that we have achieved, particularly with SiO2 and TiO2 coatings. Finally, we attempt to explore the possible applications and design limits of the technology.

Paper Details

Date Published: 4 March 1993
PDF: 5 pages
Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141036
Show Author Affiliations
Timothy W. Jolly, Oxford Instruments (United Kingdom)
Ramin Lalezari, PMS Electro-Optics (United States)

Published in SPIE Proceedings Vol. 1782:
Thin Films for Optical Systems
Karl H. Guenther, Editor(s)

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