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Proceedings Paper

Planar integration of optical multilayer and its application to the design of IR multispectral filter arrays
Author(s): Fernando Lopez; F. J. Ortiz De Frutos
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Paper Abstract

Infrared focal plane arrays (IRFPA) for staring imaging applications are now in advanced research and development stages. They offer spatial resolution in the focal plane. If spectral resolution is also required as for spectroscopic or analytical applications, a wavelength selection device is needed. The planar integration of different infrared interferencial filters on a single substrate, eventually the focal plane of such systems, would permit the obtention of arrays with spectral resolution in the focal plane and no moving parts. In this work the different aspects arising in the integration process of different IR optical multilayers on a single silicon substrate are discussed. From the experimental results of the performed works the feasibility of the proposed multispectral arrays can be derived.

Paper Details

Date Published: 4 March 1993
PDF: 6 pages
Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141030
Show Author Affiliations
Fernando Lopez, Univ. Carlos III (Spain)
F. J. Ortiz De Frutos, Univ. Politecnica de Madrid (Spain)

Published in SPIE Proceedings Vol. 1782:
Thin Films for Optical Systems
Karl H. Guenther, Editor(s)

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