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Proceedings Paper

Thermal and laser-induced phase transformation in rf-sputtered GeSb2Te4 thin films
Author(s): Songsheng Xue; Zhengxiu Fan; Fuxi Gan
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Paper Abstract

Reported here are studies about the thermal and laser induced metastable phase formation in amorphous GeSb2Te4 thin films prepared by rf-magnetron sputtering. The general structural properties of this most promising optical phase change recording material are discussed from the point of view of fast structural phase transformation.

Paper Details

Date Published: 4 March 1993
PDF: 12 pages
Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141027
Show Author Affiliations
Songsheng Xue, Shanghai Institute of Optics and Fine Mechanics (China)
Zhengxiu Fan, Shanghai Institute of Optics and Fine Mechanics (China)
Fuxi Gan, Shanghai Institute of Optics and Fine Mechanics (China)

Published in SPIE Proceedings Vol. 1782:
Thin Films for Optical Systems

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