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Proceedings Paper

Investigation of inhomogeneties and impurities in fluoride coatings for high-power excimer lasers
Author(s): Ute Kaiser; Norbert Kaiser; Peter Weisbrodt; Dirk Mademann; Erich J. Hacker
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Paper Abstract

In the thickness range 50 nm - 500 nm at substrate temperatures of 300 K, 375 K, and 575 K the structure of physical-vapor-deposited magnesium, lanthanum, calcium, and lithium fluoride films were investigated using TEM microfractographical replication technique. Two growth groups, columnar and granular growth, were found and main structure building elements with their characteristic medium size have been determined. Using SIMS, SNMS, RBS, and partially spectroscopical and gravimetrical measurements, the O and C contamination of the films has been investigated. The quantitative results were related to the characteristic structure building elements.

Paper Details

Date Published: 4 March 1993
PDF: 9 pages
Proc. SPIE 1782, Thin Films for Optical Systems, (4 March 1993); doi: 10.1117/12.141020
Show Author Affiliations
Ute Kaiser, Fraunhofer-Institution of Applied Optics and Precision Mechanics (Germany)
Norbert Kaiser, Fraunhofer-Institution of Applied Optics and Precision Mechanics (Germany)
Peter Weisbrodt, Jenoptik GmbH (Germany)
Dirk Mademann, Jenoptik GmbH (Germany)
Erich J. Hacker, Jenoptik GmbH (Germany)


Published in SPIE Proceedings Vol. 1782:
Thin Films for Optical Systems

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