Proceedings PaperStable starting materials of tantalum pentaoxide and titanium dioxide
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For obtaining thermally resistive and stable high-index materials, Ta2O5 films from a noble starting material of Ta2O5 + Ta (7 wt% added) have been developed, considering the analogy established in the case of TiO2 films. The related optical (refractive index and absorption) and stress properties both of Ta2O5 and TiO2 films are reported.