Proceedings PaperPlanetary system for high-uniformity deposited layers on large substrates
|Format||Member Price||Non-Member Price|
The thickness uniformity of vacuum deposited layers is a very important parameter for optical coatings. We have developed a computer program for the calculation of the uniformity as a function of the vapor distribution for planetary systems. This program shows the existence of a configuration such as the uniformity is practically independent of the vapor distribution. We give the example of an experimental system for processing four substrates of 300 mm diameter with a uniformity better than +/- 0.3% in a 1 m3 box coater.