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Proceedings Paper

Roughness and defect characterization of optical surfaces by light-scattering measurements
Author(s): Horst Truckenbrodt; Angela Duparre; Uwe Schuhmann
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Paper Abstract

The microtopography of a certain surface is a complicated structure varying across the complete surface. Every surface has different elements of microstructure. In this paper, we consider roughness as a fine structure and defects as large structure elements. Roughness measurement on BK7-glass and CaF2 samples is considered using different techniques. The comparison includes the automatic scatterometer STREUIX 2 and a TIS-measurement system, the ZYGO microprofilometer MAXIM (DOT) 3D, and the NANO SCOPE III of Digital Instruments. For the investigation of scattering characteristics of different surface defects, a special measuring device was developed. The scattered light distribution of different defects and contaminations measured with this set-up is discussed.

Paper Details

Date Published: 1 January 1993
PDF: 13 pages
Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.141001
Show Author Affiliations
Horst Truckenbrodt, Friedrich-Schiller-Univ. Jena (Germany)
Angela Duparre, Fraunhofer-Institute for Applied Optics and Fine Mechanics (Germany)
Uwe Schuhmann, Jenoptik GmbH (Germany)


Published in SPIE Proceedings Vol. 1781:
Specification and Measurement of Optical Systems

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