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Proceedings Paper

Absolute interferometric surface testing: a stringent need
Author(s): Karl-Edmund Elssner; Regina Burow; Guenter Schulz; Andreas Vogel
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Paper Abstract

The attainable accuracy in interferometric surface testing is limited by the precision of the reference surface (relative testing). Therefore, this surface has to be measured independently with sufficient accuracy as compared to an ideal mathematical surface (absolute testing). The importance of further developments of methods for absolute interferometric testing for the optical shop and for standardization purposes is discussed and emphasized. Results of our own developments in absolute flatness testing are presented.

Paper Details

Date Published: 1 January 1993
PDF: 7 pages
Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.140979
Show Author Affiliations
Karl-Edmund Elssner, Berliner Institut fuer Optik GmbH (Germany)
Regina Burow, Berliner Institut fuer Optik GmbH (Germany)
Guenter Schulz, Berliner Institut fuer Optik GmbH (Germany)
Andreas Vogel, Berliner Institut fuer Optik GmbH (Germany)


Published in SPIE Proceedings Vol. 1781:
Specification and Measurement of Optical Systems

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