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Proceedings Paper

Micro phase-shifting interferometer for surface measurement
Author(s): Hans-Joerg Heimbeck
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Paper Abstract

Design and application of a rigid miniaturized phase shift interferometer is presented. The matchbox size instrument has a Twyman-Green setup and an integrated CCD camera. A standard HeNe laser supplies the light through a monomode fiber. The advantages in measuring big and small objects are discussed. The sensor-like instrument can even be integrated into manufacturing equipment.

Paper Details

Date Published: 1 January 1993
PDF: 3 pages
Proc. SPIE 1781, Specification and Measurement of Optical Systems, (1 January 1993); doi: 10.1117/12.140968
Show Author Affiliations
Hans-Joerg Heimbeck, Fisba Optik AG (Switzerland)


Published in SPIE Proceedings Vol. 1781:
Specification and Measurement of Optical Systems

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