Share Email Print
cover

Proceedings Paper

Design review of an infrared phase-shifting interferometer
Author(s): Paul R. DeStefano; Arthur B. Western; H. Philip Stahl; Charles Joenathan
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

The design and system performance of an infrared phase-stepping interferometer is reviewed. This instrument is capable of measuring rms surface roughness with a repeatability of 0.02 waves. The instrument uses a 4-bucket unwrapping algorithm. Calibration of the interferometer and removal of inherent system aberrations are discussed along with the system performance, including repeatability and accuracy. The interferometer is an all-reflective optics design to permit use at any wavelength, accommodating both far- (10.6 micron) and near- (5 micron) infrared sources. Testing applications include infrared windows and surface testing.

Paper Details

Date Published: 2 September 1992
PDF: 12 pages
Proc. SPIE 1779, Optical Design and Processing Technologies and Applications, (2 September 1992); doi: 10.1117/12.140937
Show Author Affiliations
Paul R. DeStefano, GCA Tropel (United States)
Arthur B. Western, Rose-Hulman Institute of Technology (United States)
H. Philip Stahl, Rose-Hulman Institute of Technology (United States)
Charles Joenathan, Rose-Hulman Institute of Technology (United States)


Published in SPIE Proceedings Vol. 1779:
Optical Design and Processing Technologies and Applications
Robert J. Heaston, Editor(s)

© SPIE. Terms of Use
Back to Top