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Proceedings Paper

Design review of an infrared phase-shifting interferometer
Author(s): Paul R. DeStefano; Arthur B. Western; H. Philip Stahl; Charles Joenathan
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Paper Abstract

The design and system performance of an infrared phase-stepping interferometer is reviewed. This instrument is capable of measuring rms surface roughness with a repeatability of 0.02 waves. The instrument uses a 4-bucket unwrapping algorithm. Calibration of the interferometer and removal of inherent system aberrations are discussed along with the system performance, including repeatability and accuracy. The interferometer is an all-reflective optics design to permit use at any wavelength, accommodating both far- (10.6 micron) and near- (5 micron) infrared sources. Testing applications include infrared windows and surface testing.

Paper Details

Date Published: 2 September 1992
PDF: 12 pages
Proc. SPIE 1779, Optical Design and Processing Technologies and Applications, (2 September 1992); doi: 10.1117/12.140937
Show Author Affiliations
Paul R. DeStefano, GCA Tropel (United States)
Arthur B. Western, Rose-Hulman Institute of Technology (United States)
H. Philip Stahl, Rose-Hulman Institute of Technology (United States)
Charles Joenathan, Rose-Hulman Institute of Technology (United States)

Published in SPIE Proceedings Vol. 1779:
Optical Design and Processing Technologies and Applications
Robert J. Heaston, Editor(s)

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