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Proceedings Paper

Development and calibration of UV/VUV radiometric sources
Author(s): J. Mervin Bridges
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Paper Abstract

A program exists at NIST to calibrate radiometric sources for the spectral range from 118-350 nm. These include deuterium lamps, hollow-cathode lamps, RF-excited dimer lamps, and wall-stabilized argon arcs. Sources have been calibrated for and used by researchers in solar physics, astrophysics, atmospheric physics (ozone measurements), magnetically controlled fusion, and photobiology. The argon arcs were developed in our laboratory, and provide intense sources of both radiance and irradiance. Calibrations are performed relative to two primary sources, a wall-stabilized hydrogen arc and a 12,000 K black-body line arc, both developed in our laboratory. Also we recently have begun periodic calibrations on the NIST storage ring, SURF II, to insure consistency between our respective radiometric bases. Various sources have been calibrated for space' applications, including several which are flyable. Also, some development and testing of radiometers for semiconductor lithography were recently carried out with an intense argon arc source.

Paper Details

Date Published: 22 January 1993
PDF: 9 pages
Proc. SPIE 1764, Ultraviolet Technology IV, (22 January 1993); doi: 10.1117/12.140854
Show Author Affiliations
J. Mervin Bridges, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1764:
Ultraviolet Technology IV
Robert E. Huffman, Editor(s)

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