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Proceedings Paper

Absolute measurements of 3D shape using white-light interferometer
Author(s): Masahide Itoh; Ronglong Tian; Toyohiko Yatagai
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Paper Abstract

In the Twyman-Green type interferometer the absolute height of a sample can be measured using a broad-band light source. The reference mirror is scanned along the optical axis to detect the point that the optical path difference is zero. We can obtain a three dimensional contour map without restricting 2(pi) phase unwrap. We constructed an interferometric system using a white-light as a light source and measured a step of 20 micrometers .

Paper Details

Date Published: 5 February 1993
PDF: 5 pages
Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); doi: 10.1117/12.140782
Show Author Affiliations
Masahide Itoh, Univ. of Tsukuba (Japan)
Ronglong Tian, Univ. of Tsukuba (Japan)
Toyohiko Yatagai, Univ. of Tsukuba (Japan)

Published in SPIE Proceedings Vol. 1755:
Interferometry: Techniques and Analysis
Gordon M. Brown; Osuk Y. Kwon; Malgorzata Kujawinska; Graeme T. Reid, Editor(s)

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