Share Email Print
cover

Proceedings Paper

Improvement of optical heterodyne interferometric microscope
Author(s): Evgeny M. Zolotov; V. M. Pelekhaty; K. K. Swidzinsky; R. F. Tagiev
Format Member Price Non-Member Price
PDF $14.40 $18.00

Paper Abstract

We present a modified scheme of an optical heterodyne interferometric microscope. Reference signal is taken from a low-frequency generator rather than a photodiode to improve stability. Slit aperture is introduced to increase the detected signal. Frequencies of acoustic waves applied to the Bragg cell are adjusted to improve spatial resolution.

Paper Details

Date Published: 5 February 1993
PDF: 6 pages
Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); doi: 10.1117/12.140769
Show Author Affiliations
Evgeny M. Zolotov, General Physics Institute (Russia)
V. M. Pelekhaty, General Physics Institute (Russia)
K. K. Swidzinsky, General Physics Institute (Russia)
R. F. Tagiev, General Physics Institute (Russia)


Published in SPIE Proceedings Vol. 1755:
Interferometry: Techniques and Analysis
Gordon M. Brown; Osuk Y. Kwon; Malgorzata Kujawinska; Graeme T. Reid, Editor(s)

© SPIE. Terms of Use
Back to Top