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Proceedings Paper

Holographic recording of large-aperture, high-efficiency, high-damage-threshold, transmission diffraction gratings
Author(s): J. Joseph Armstrong; Terrance J. Kessler
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Paper Abstract

Surface-relief, holographic transmission gratings are generated in positive photoresist with excellent performance characteristics. High intrinsic grating efficiencies of 99% are obtained using an inherently fringe-stable holographic interferometer, which is maximally insensitive to incident pointing errors, to create high aspect ratio nonsinusoidal grooves. Uniform exposures are achieved over apertures of 100 mm in diameter using scanning techniques. Repeatable results are achieved by maintaining pre-exposure and post-exposure processing along with the various exposure parameters.

Paper Details

Date Published: 5 February 1993
PDF: 7 pages
Proc. SPIE 1755, Interferometry: Techniques and Analysis, (5 February 1993); doi: 10.1117/12.140754
Show Author Affiliations
J. Joseph Armstrong, Univ. of Rochester (United States)
Terrance J. Kessler, Univ. of Rochester (United States)

Published in SPIE Proceedings Vol. 1755:
Interferometry: Techniques and Analysis
Gordon M. Brown; Osuk Y. Kwon; Malgorzata Kujawinska; Graeme T. Reid, Editor(s)

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