Share Email Print
cover

Proceedings Paper

High-reflectance coatings for space applications in the EUV
Author(s): Ritva A. M. Keski-Kuha; Jeffrey S. Gum; John F. Osantowski; Charles M. Fleetwood
Format Member Price Non-Member Price
PDF $14.40 $18.00
cover GOOD NEWS! Your organization subscribes to the SPIE Digital Library. You may be able to download this paper for free. Check Access

Paper Abstract

Advances in optical coating and materials technology have made possible the development of instruments with substantially improved efficiency and made possible to consider more complex optical designs in the EUV. The importance of recent developments in chemical vapor deposited silicon carbide (CVD-SiC), SiC films and multilayer coatings is discussed in the context of EUV instrumentation design. The EUV performance of these coatings as well as some strengths and problem areas for their use in space will be addressed.

Paper Details

Date Published: 21 January 1993
PDF: 8 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140605
Show Author Affiliations
Ritva A. M. Keski-Kuha, NASA Goddard Space Flight Ctr. (United States)
Jeffrey S. Gum, NASA Goddard Space Flight Ctr. (United States)
John F. Osantowski, NASA Goddard Space Flight Ctr. (United States)
Charles M. Fleetwood, NASA Goddard Space Flight Ctr. (United States)


Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

© SPIE. Terms of Use
Back to Top