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Proceedings Paper

New method for achieving accurate thickness control for uniform and graded multilayer coatings on large flat substrates
Author(s): George Gutman; John E. Keem; Kevin Parker; James L. Wood; Richard N. Watts; Charles Tarrio
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Paper Abstract

High performance in normal incidence soft X-ray optical systems requires accurate control of the d-spacing across the surface of each mirror in the system. As a first step towards being able to fabricate any desired d-spacing variation, we demonstrate the ability to produce large (25 x 150 mm) flat Mo/Si multilayer coated mirrors with a d-spacing uniformity of +/- 0.4 percent. Instead of applying the approach most often taken to minimize the d-spacing variation physical shielding of the deposition source, we use a mask with a corrected profile positioned just in front of the rotating substrate to compensate for the nonuniform deposition flux. Results obtained from hard (lambda = 0.154 nm) and soft (wavelength of interest) X-ray mapping of the surface are presented along with a discussion of the technique used to control the d-spacing distribution.

Paper Details

Date Published: 21 January 1993
PDF: 9 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140602
Show Author Affiliations
George Gutman, Ovonic Synthetic Materials Co. (United States)
John E. Keem, Ovonic Synthetic Materials Co. (United States)
Kevin Parker, Ovonic Synthetic Materials Co. (United States)
James L. Wood, Ovonic Synthetic Materials Co. (United States)
Richard N. Watts, National Institute of Standards and Technology (United States)
Charles Tarrio, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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