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Proceedings Paper

Imaging Schwarzschild multilayer x-ray microscope
Author(s): Richard B. Hoover; Phillip C. Baker; David L. Shealy; David B. Gore; Arthur B. C. Walker; Troy W. Barbee; Ted Kerstetter
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Paper Abstract

We have designed, analyzed, fabricated, and tested Schwarzschild multilayer X-ray microscopes. These instruments use flow-polished Zerodur mirror substrates which have been coated with multilayers optimized for maximum reflectivity at normal incidence at 135 A. They are being developed as prototypes for the Water Window Imaging X-Ray Microscope. Ultrasmooth mirror sets of hemlite grade sapphire have been fabricated and they are now being coated with multilayers to reflect soft X-rays at 38 A, within the biologically important 'water window'. In this paper, we discuss the fabrication of the microscope optics and structural components as well as the mounting of the optics and assembly of the microscopes. We also describe the optical alignment, interferometric and visible light testing of the microscopes, present interferometrically measured performance data, and provide the first results of optical imaging tests.

Paper Details

Date Published: 21 January 1993
PDF: 14 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140596
Show Author Affiliations
Richard B. Hoover, NASA Marshall Space Flight Ctr. (United States)
Phillip C. Baker, Baker Consulting (United States)
David L. Shealy, Univ. of Alabama/Birmingham (United States)
David B. Gore, Univ. of Alabama/Birmingham (United States)
Arthur B. C. Walker, Stanford Univ. (United States)
Troy W. Barbee, Lawrence Livermore National Lab. (United States)
Ted Kerstetter, Univ. of Alabama/Birmingham (United States)


Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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