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Proceedings Paper

Interferometric methods for assessment of toroidal diffraction grating performance
Author(s): Phillip C. Baker; Paolo Bergamini; Thomas E. Berger; J. Gethyn Timothy
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Paper Abstract

The measurement of the shape and optical performance of toroidal mirrors has always presented a challenge to the manufacturer and user of these types of optical elements. This report presents a technique for evaluating the complex shape and optical performance of long radius toroidal mirrors that are to be used in the EUV. The measurement techniques will be discussed and examples given. Interferometric analysis will be presented. Performance spot diagrams and MTF analysis will be discussed. Manufacturing techniques will be evaluated with respect to the application of more definitive measurement technology.

Paper Details

Date Published: 21 January 1993
PDF: 11 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140578
Show Author Affiliations
Phillip C. Baker, Baker Consulting (United States)
Paolo Bergamini, Stanford Univ. (Italy)
Thomas E. Berger, Stanford Univ. (United States)
J. Gethyn Timothy, Stanford Univ. (United States)

Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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