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Proceedings Paper

Soft x-ray reflectometry program at the National Insitute of Standards and Technology
Author(s): Richard N. Watts; Thomas B. Lucatorto; Charles Tarrio
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Paper Abstract

In response to the metrology needs of the soft X-ray community, the National Institute of Standards and Technology (NIST) has initiated a program devoted to the characterization of multilayer coated optics in the 4-40 nm wavelength region. In this paper, we describe the synchrotron based XUV reflectometers in use and under construction at NIST. We review the characteristics of the Synchrotron Ultraviolet Radiation Facility storage ring (SURF II) discuss the capabilities of the existing reflectometry facility, and present the final design parameters, expected performance, and construction status of a new reflectometry beam line.

Paper Details

Date Published: 21 January 1993
PDF: 9 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140570
Show Author Affiliations
Richard N. Watts, National Institute of Standards and Technology (United States)
Thomas B. Lucatorto, National Institute of Standards and Technology (United States)
Charles Tarrio, National Institute of Standards and Technology (United States)


Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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