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Proceedings Paper

W/C multilayers deposited on plastic films
Author(s): Shoji Seki; Tsukasa Miyazaki; Motoshige Tatsumi; Koujun Yamashita
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Paper Abstract

W/C multilayers were deposited on plastic films, which had thin thickness and light weight. TEM images showed the surface roughness of the plastic films and the boundary roughness of the multilayers. X-ray reflectivities were measured at wavelengths of 0.154 nm, 0.834 nm, and 0.3 to 0.7 nm. The boundary roughness values of the multilayers deposited on a polyimide film and a Si wafer were estimated to be 1.2 nm and 0.7 nm, respectively.

Paper Details

Date Published: 21 January 1993
PDF: 5 pages
Proc. SPIE 1742, Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography, (21 January 1993); doi: 10.1117/12.140565
Show Author Affiliations
Shoji Seki, Nitto Denko Corp. (Japan)
Tsukasa Miyazaki, Nitto Denko Corp. (Japan)
Motoshige Tatsumi, Nitto Denko Corp. (Japan)
Koujun Yamashita, Institute of Space and Astronautical Science (Japan)


Published in SPIE Proceedings Vol. 1742:
Multilayer and Grazing Incidence X-Ray/EUV Optics for Astronomy and Projection Lithography
Richard B. Hoover; Arthur B. C. Walker, Editor(s)

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