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Proceedings Paper

Surface-roughness measurements of SiC x-ray mirrors
Author(s): Tomoya Uruga; Hitoshi Yamaoka; Etsuo Arakawa; Xiao-Min Tong; Masaru Matsuoka; Koujun Yamashita
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Paper Abstract

Our recent experimental and analytical results obtained so far for the surface roughness of the Pt-coated SiC flat mirrors are reviewed. Total reflectivity and angle resolved scattering (ARS) curves were measured using CuK(alpha) x ray for an 800 mm long mirror and three kinds of small mirrors having different surface roughness without heat load. The convolution analysis of ARS curves derived the power spectra of the surface waving of the mirror. The root mean square surface roughness calculated from the integral of the power spectrum is consistent with that estimated from the total reflectivity data. Also, the range of the surface wave number contributing the x-ray reflection was estimated and compared with that measured with the other types of experimental methods, heterodyne interferometer and scanning tunnel microscopy.

Paper Details

Date Published: 25 February 1993
PDF: 8 pages
Proc. SPIE 1739, High Heat Flux Engineering, (25 February 1993); doi: 10.1117/12.140536
Show Author Affiliations
Tomoya Uruga, RIKEN--The Institute of Physical and Chemical Research (Japan)
Hitoshi Yamaoka, RIKEN--The Institute of Physical and Chemical Research (Japan)
Etsuo Arakawa, RIKEN--The Institute of Physical and Chemical Research (Japan)
Xiao-Min Tong, RIKEN--The Institute of Physical and Chemical Research (Japan)
Masaru Matsuoka, RIKEN--The Institute of Physical and Chemical Research (Japan)
Koujun Yamashita, Institute of Space and Astronautical Science (Japan)


Published in SPIE Proceedings Vol. 1739:
High Heat Flux Engineering
Ali M. Khounsary, Editor(s)

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