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Proceedings Paper

Test of holographic SiC gratings for high-power synchrotron radiation
Author(s): Eiji Ishiguro; Hideki Maezawa; Makoto Sakurai; Mihiro Yanagihara; Makoto Watanabe; Masaru Koeda; Tetsuya Nagano; Kazuo Sano; Yasuhiro Akune; Kichiya Tanino
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Paper Abstract

SiC laminar gratings have been fabricated by reactive ion-beam etching and holographic exposure. Diffraction efficiencies were measured in the region between 17 angstroms and 300 angstroms. The efficiency of the +1 order was 5 to 20% in this region with a small amount of scattered lights. An irradiation test for the SiC gratings was performed by using intense radiation with a power density of 2.7 W/mm2 emitted from a multipole wiggler installed into the 2.5 GeV Photon Factory ring. No visible damages and no reduction of the diffraction efficiencies were observed for the uncoated SiC grating after the irradiation, while a remarkable deformation of the deposited Au layer and increase of the scattered light component were observed for the grating coated with Au. In addition to these results, some experimental results of polishability of CVD-SiC are reported.

Paper Details

Date Published: 25 February 1993
PDF: 12 pages
Proc. SPIE 1739, High Heat Flux Engineering, (25 February 1993); doi: 10.1117/12.140515
Show Author Affiliations
Eiji Ishiguro, Osaka City Univ. (Japan)
Hideki Maezawa, National Lab. for High Energy Physics (Japan)
Makoto Sakurai, National Institute for Fusion Science (Japan)
Mihiro Yanagihara, Tohoku Univ. (Japan)
Makoto Watanabe, Institute for Molecular Science (Japan)
Masaru Koeda, Shimadzu Corp. (Japan)
Tetsuya Nagano, Shimadzu Corp. (Japan)
Kazuo Sano, Shimadzu Corp. (Japan)
Yasuhiro Akune, Nippon Pillar Packing Co., LTD. (Japan)
Kichiya Tanino, Nippon Pillar Packing Co., LTD. (Japan)


Published in SPIE Proceedings Vol. 1739:
High Heat Flux Engineering
Ali M. Khounsary, Editor(s)

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