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Proceedings Paper

Fabrication of 2D continuous-relief diffractive optical elements
Author(s): Michael T. Gale; Markus Rossi; Helmut Schuetz; Peter Ehbets; Hans Peter Herzig; Juan Manuel Teijido
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Paper Abstract

Progress in the fabrication of diffractive optical elements (DOEs) as 2-dimensional continuous-relief microstructures is described. The elements are fabricated by laser-beam writing in photoresist and have typical microreliefs up to 5 micrometers and periods down to 10 micrometers . Examples include fan-out elements and Fresnel microlens arrays. The design and fabrication of a 9 X 9 fan-out DOE with a diffraction efficiency of 94% and an overall uniformity of +/- 8% is described. High quality replicas are produced by low-cost embossing and casting techniques.

Paper Details

Date Published: 2 March 1993
PDF: 9 pages
Proc. SPIE 1732, Holographics International '92, (2 March 1993); doi: 10.1117/12.140448
Show Author Affiliations
Michael T. Gale, Paul Scherrer Institute (Switzerland)
Markus Rossi, Paul Scherrer Institute (Switzerland)
Helmut Schuetz, Paul Scherrer Institute (Switzerland)
Peter Ehbets, Univ. of Neuchatel (Switzerland)
Hans Peter Herzig, Univ. of Neuchatel (Switzerland)
Juan Manuel Teijido, Univ. of Neuchatel (Switzerland)


Published in SPIE Proceedings Vol. 1732:
Holographics International '92

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