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Proceedings Paper

Holographic interference microscope for the investigation of surface-mounted devices
Author(s): Jan Hornung; Guenther K.G. Wernicke
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Paper Abstract

Holographic interferometry is a widely used tool for nondestructive testing of mechanical deformations. In connection with microscopy, it is also possible to investigate very small objects. However, due to the imaging system used to magnify the object, the visibility of the interference pattern is disturbed. This disturbance still remains even if the conjugated reconstruction is applied. To decrease the influence of the imaging system, the aperture must be of small size. To suppress the speckle effect, the hologram should be made as an image plane hologram.

Paper Details

Date Published: 2 March 1993
PDF: 4 pages
Proc. SPIE 1732, Holographics International '92, (2 March 1993); doi: 10.1117/12.140383
Show Author Affiliations
Jan Hornung, Humboldt Univ./Berlin (Germany)
Guenther K.G. Wernicke, Humboldt Univ./Berlin (Germany)


Published in SPIE Proceedings Vol. 1732:
Holographics International '92

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