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Proceedings Paper

Image information modulation and processing for fringe scanning optical profiler
Author(s): Jiabi Chen; Zhengze Zhang; Li Zhu
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Paper Abstract

Fringe scanning technique is widely used to test the shape of optical element surfaces. In this paper, a method of image information modulation and processing for a fringe scanning optical profile used to measure surface roughness of precision machinery parts is presented. The reference mirror of a classical Linnik microinterferometer is driven by a piezoelectrical transducer (PZT) modulated using saw-wave, and the phase of interfering fringe is shifted linearly. The image data acquisition system, including a CCD array, PZT, DMAC6844, AD7820, has realized high synchronous data sampling frequency of 250 KB/sec and 10 bit A/D converting. The experimental results show that the converted Linnik microinterferometer can measure the roughness of precision surface where Ra is less than 0.01 m and obtain various standard parameters of roughness. Therefore, the function and precision of the instrument could be enhanced significantly.

Paper Details

Date Published: 24 April 1992
PDF: 4 pages
Proc. SPIE 1731, Soviet-Chinese Joint Seminar on Holography and Optical Information Processing, (24 April 1992); doi: 10.1117/12.140364
Show Author Affiliations
Jiabi Chen, Nanjing Normal Univ. (China)
Zhengze Zhang, Huazhong Univ. of Science and Technology (China)
Li Zhu, Huazhong Univ. of Science and Technology (China)


Published in SPIE Proceedings Vol. 1731:
Soviet-Chinese Joint Seminar on Holography and Optical Information Processing

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