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Proceedings Paper

Electro-optical information processing for optical heterodyne interferometry profilometer
Author(s): Tao Chen; Li Zhu; Jiabi Chen
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Paper Abstract

In this paper, the method for the electro-optical information processing in the heterodyne profilometer we have made is described. It is based on optical heterodyne interferometry and phase detection techniques. Height variations are less than 1 nm and lateral resolution is less than 2 micrometers . More than ten parameters of surface roughness could be calculated and a real profile of the measured surface could be obtained.

Paper Details

Date Published: 24 April 1992
PDF: 4 pages
Proc. SPIE 1731, Soviet-Chinese Joint Seminar on Holography and Optical Information Processing, (24 April 1992); doi: 10.1117/12.140363
Show Author Affiliations
Tao Chen, Huazhong Univ. of Science and Technology (China)
Li Zhu, Huazhong Univ. of Science and Technology (China)
Jiabi Chen, Nanjing Normal Univ. (China)


Published in SPIE Proceedings Vol. 1731:
Soviet-Chinese Joint Seminar on Holography and Optical Information Processing

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