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Proceedings Paper

First measuring results concerning a new thin-film absolute radiometer
Author(s): E. Kessler; Juergen E. Mueller; F. Voelklein; M. Pawlak; Klaus Moestl; Friedhelm Brandt
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Paper Abstract

In using silicon integrated-circuit technology now, we have developed a new detector for the absolute measurement of radiation fluxes by combining a thin-film thermopile with a (meandered) heating element arranged within the receiving area system following our former thin-film absolute radiometer conception from 1980. The sensing junctions and legs of the thermopile and the heater are supported on a thin Si3N4/SiO2 membrane formed by anisotropic etching of the Si base material. The multijunction thin-film thermopile is fabricated from BiSb and Sb in a multilayer technique by microlithographic methods. The 76 sensing junctions are arranged on the periphere of the receiving area 7 mm in diameter. The membrane and chip dimensions are 8 X 8 mm2 and 12.5 X 12.5 mm2, resp. It is intended to minimize both the temperature coefficient (TC) of the responsivity and of the calibration of the device. First measuring results of responsivity of the detector, its TC, linearity, time constant and the local distribution of responsivity are represented and possibilities are shown to improve these parameters by choosing appropriate materials for the heater as well as the thermopile.

Paper Details

Date Published: 9 February 1993
PDF: 10 pages
Proc. SPIE 1712, 14th Symposium on Photonic Measurement, (9 February 1993); doi: 10.1117/12.140164
Show Author Affiliations
E. Kessler, Institut fuer Physikalische Hochtechnologie e.V. (Germany)
Juergen E. Mueller, Institut fuer Physikalische Hochtechnologie e.V. (Germany)
F. Voelklein, Institut fuer Physikalische Hochtechnologie e.V. (Germany)
M. Pawlak, Physikalisch-Technische Bundesanstalt (Germany)
Klaus Moestl, Physikalisch-Technische Bundesanstalt (Germany)
Friedhelm Brandt, Physikalisch-Technische Bundesanstalt (Germany)


Published in SPIE Proceedings Vol. 1712:
14th Symposium on Photonic Measurement

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