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Proceedings Paper

Effects of thin films on interferometric step height measurements
Author(s): Thomas H. McWaid; Theodore V. Vorburger; Jun-Feng Song; Deane Chandler-Horowitz
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Paper Abstract

Optical profiling instruments utilizing phase-shifting interferometry offer one the opportunity to obtain a large amount of surface texture data quickly without damaging the measured surface. Unfortunately, the presence of dissimilar surface materials or even spatial variations in the subsurface morphology can result in spurious optical measurements. This paper presents equations that can be used to calculate the reflection of electromagnetic radiation from thin film structures. These equations are utilized to determine what minimum metal overcoat thickness will ensure accurate optical step height measurements. Interferometric and stylus- based measurements of three thin film steps are presented and discussed. An opaque metal overcoat is found to be essential to the accurate optical measurement of step heights.

Paper Details

Date Published: 15 December 1992
PDF: 12 pages
Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); doi: 10.1117/12.139238
Show Author Affiliations
Thomas H. McWaid, National Institute of Standards and Technology (United States)
Theodore V. Vorburger, National Institute of Standards and Technology (United States)
Jun-Feng Song, National Institute of Standards and Technology (United States)
Deane Chandler-Horowitz, National Institute of Standards and Technology (United States)

Published in SPIE Proceedings Vol. 1776:
Interferometry: Surface Characterization and Testing
Katherine Creath; John E. Greivenkamp, Editor(s)

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