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Proceedings Paper

Limitations of phase-measuring interferometry for surface characterization and testing: a review
Author(s): Eugene R. Cochran
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Paper Abstract

Since its discovery, interferometry has grown into a powerful technique for the characterization and evaluation of optical surfaces. With the advent of phase-measurement algorithms, computers, and solid state detectors, it is now possible to acquire wavefront maps over a well sampled pupil in fractions of a second. Nevertheless, even though there have been significant advances, limitations of the technology should always be acknowledged. Emphasis in this paper is placed on reviewing basic interference, optical component, source, imaging, phase-shifting, detector, mechanical and acoustical stability, air turbulence, and sampling requirements for high accuracy and precision phase-shifting interferometry measurements. Limitations of the technology will be outlined, and where applicable, techniques developed to overcome limitations will be discussed and references sited.

Paper Details

Date Published: 15 December 1992
PDF: 7 pages
Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); doi: 10.1117/12.139237
Show Author Affiliations
Eugene R. Cochran, Research Corporation Technologies (United States)


Published in SPIE Proceedings Vol. 1776:
Interferometry: Surface Characterization and Testing
Katherine Creath; John E. Greivenkamp, Editor(s)

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