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Proceedings Paper

Absolute testing of flats using four data sets
Author(s): Lianzhen Shao; Robert E. Parks; Chiayu Ai
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Paper Details

Date Published: 15 December 1992
PDF: 4 pages
Proc. SPIE 1776, Interferometry: Surface Characterization and Testing, (15 December 1992); doi: 10.1117/12.139231
Show Author Affiliations
Lianzhen Shao, Tucson Optical Research Corp. (United States)
Robert E. Parks, Optical Sciences Ctr./Univ. of Arizona (United States)
Chiayu Ai, WYKO Corp. (United States)

Published in SPIE Proceedings Vol. 1776:
Interferometry: Surface Characterization and Testing
Katherine Creath; John E. Greivenkamp, Editor(s)

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