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Proceedings Paper

Automatic visual inspection system for thin film magnetic head wafer using optical enhancement and image processing techniques
Author(s): Yukio Matsuyama; Hisafumi Iwata; Hitoshi Kubota
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Paper Details

Date Published: 12 January 1993
PDF: 11 pages
Proc. SPIE 1771, Applications of Digital Image Processing XV, (12 January 1993); doi: 10.1117/12.139060
Show Author Affiliations
Yukio Matsuyama, Hitachi Production Engineering Research Lab. (Japan)
Hisafumi Iwata, Hitachi Production Engineering Research Lab. (Japan)
Hitoshi Kubota, Hitachi Production Engineering Research Lab. (Japan)


Published in SPIE Proceedings Vol. 1771:
Applications of Digital Image Processing XV
Andrew G. Tescher, Editor(s)

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