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Proceedings Paper

Fabricating binary optics in infrared and visible materials
Author(s): Margaret B. Stern; Michael Holz; Theresa Rubico Jay
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Paper Abstract

An overview of binary optics fabrication techniques, optimized to obtain high-quality micro- optics in visible and infrared materials, is presented. Maximum optical efficiency has been achieved for diffractive quartz microlenses at (lambda) equals 633 nm by controlling the critical fabrication parameters of alignment and etch depth. The degradation in optical efficiency of four-phase-level fused silica microlenses, resulting from an intentional 0.35 micrometers translational error, has been systematically measured as a function of lens speed (F/3 - F/65). Novel processing techniques that enable the fabrication of IR and visible refractive micro-optic arrays such as multilayer resist techniques, deep anisotropic Si-etching, and the formation of analog polymer lenslet arrays are described. Initial results are presented for both monolithic and hybrid integration of layered refractive micro-optic systems.

Paper Details

Date Published: 13 January 1993
PDF: 11 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138908
Show Author Affiliations
Margaret B. Stern, Lincoln Lab./MIT (United States)
Michael Holz, Lincoln Lab./MIT (United States)
Theresa Rubico Jay, Lincoln Lab./MIT (United States)

Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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