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Proceedings Paper

Fabrication and measurement of fused silica microlens arrays
Author(s): Keith O. Mersereau; Casimir R. Nijander; Avi Y. Feldblum; Wesley P. Townsend
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Paper Abstract

We report fabrication of refractive microlens arrays in fused silica (SiO2) with a variety of pitches, diameters, and focal lengths. Typical f-numbers range from f/1.5 to f/5. Melted photoresist lenses are made on a fused silica substrate, and etched into the SiO2 using reactive ion etching (RIE) by carefully controlling the etch ratio. Techniques for microlens testing and measurement are discussed.

Paper Details

Date Published: 13 January 1993
PDF: 5 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138900
Show Author Affiliations
Keith O. Mersereau, AT&T Bell Labs. (United States)
Casimir R. Nijander, AT&T Bell Labs. (United States)
Avi Y. Feldblum, AT&T Bell Labs. (United States)
Wesley P. Townsend, AT&T Bell Labs. (United States)

Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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