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Proceedings Paper

Microhybrid integrated devices and components: microphotonic devices
Author(s): Koichi Imanaka
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Paper Abstract

Miniaturized opto-electronic and opto-electro-micromechanic hybrid integrated components are developed utilizing newly developed micro active semiconductor devices (e.g., laser diode, pin-point emission LED), micro optic passive devices (e.g., micro Fresnel lens, grating devices), and micro actuators. As a typical example, high-performance collimated and focused light sources, optical sensing devices, and two dimensional optical scanner are presented in detail.

Paper Details

Date Published: 13 January 1993
PDF: 11 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138899
Show Author Affiliations
Koichi Imanaka, Omron Corp. (Japan)


Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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