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Proceedings Paper

Effect of refractive microlens array fabrication parameters on optical quality
Author(s): Theresa Rubico Jay; Margaret B. Stern; Robert E. Knowlden
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Paper Abstract

Refractive microlens arrays with lens speed F/1 to F/5 are fabricated by the PROM (photoresist refractive optics by melting) technique. Optimal PROM fabrication parameters are determined from interferometric measurements of the optical quality. Elements in a hexagonal PROM microlens array, composed of 10,000 200 micrometers diameter F/2 lenses on 205 micrometers centers, exhibit less than one-tenth wave deviation from sphere. Four planes of these F/2 microlens arrays, each containing 10,000 lenslets have been assembled into an afocal imaging system.

Paper Details

Date Published: 13 January 1993
PDF: 10 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138886
Show Author Affiliations
Theresa Rubico Jay, Lincoln Lab./MIT (United States)
Margaret B. Stern, Lincoln Lab./MIT (United States)
Robert E. Knowlden, Lincoln Lab./MIT (United States)

Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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