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Proceedings Paper

Diffraction reference wavefront laser interferometer
Author(s): Vladimir K. Kirillovsky
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Paper Abstract

The current presentation describes an interferometer which may be used to improve correction of interferometric measurements. In this device reference wavefront is created in the process of laser beam diffraction when it is focused on 0.5 (lambda) pinhole. The low value of about (lambda) /100 for wavefront errors or (lambda) /200 for the surface errors proves the good quality of the optical systems. A new interferometer has been used for optical shop testing of precision microscope objectives, laser beam researches, etc. Some applications of the new interferometer are presented.

Paper Details

Date Published: 13 January 1993
PDF: 4 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138881
Show Author Affiliations
Vladimir K. Kirillovsky, St. Petersburg Institute of Fine Mechanics and Optics (Russia)


Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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