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Proceedings Paper

Two-dimensional array of AR-coated diffractive microlenses fabricated by thin-film deposition
Author(s): Edgar Pawlowski; Herbert Engel; Margit Ferstl; Walther Fuerst; Berndt Kuhlow
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Paper Abstract

Two dimensional arrays of Fresnel zone micro lenses were fabricated and coated with antireflection layers by ion-beam-sputter deposition technique. The thickness of the layers was controlled by a reflection-wideband-monitoring-system with high accuracy. The lenses have a circular aperture of 2 mm and focal lengths of 70 mm and 20 mm for the wavelength of 0.63 micrometers and focal lengths of 29 mm, 8 mm, and 5.6 mm for the wavelength of 1.52 micrometers . The blazed profile in each zone was approximated by an eight level profile. Such stepped profiles were recorded with several masks, written with e-beam and with photolithographic technology. Our measurements reveal that the spot-sizes of the fabricated microlenses are close to the diffraction limited values, and the diffraction efficiency for the eight level structure is 83 percent.

Paper Details

Date Published: 13 January 1993
PDF: 9 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138880
Show Author Affiliations
Edgar Pawlowski, Heinrich-Hertz-Institut (Germany)
Herbert Engel, Heinrich-Hertz-Institut (Germany)
Margit Ferstl, Heinrich-Hertz-Institut (Germany)
Walther Fuerst, Heinrich-Hertz-Institut (Germany)
Berndt Kuhlow, Heinrich-Hertz-Institut (Germany)

Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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