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Proceedings Paper

New diffractive optical elements
Author(s): Sergei T. Bobrov; Boris N. Kotletsov; Yuri G. Turkevich
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Paper Abstract

Two classes of DOE in which fabrication is based on the technology used in microelectronics are considered: multiorder binary-phase (Dammann) gratings, and diffractive aberration correctors. Calculating the structure of the element is necessary to take into account the unavoidable technological deviations from the theoretical profile. The current presentation describes the methods and results of computation and fabrication of up to 41 equal orders gratings with optimal combination of diffraction efficiency and technological stability and aberration correctors for the focusing objectives of a laser player. The variants of such objectives permitting reduction of the technological difficulties of corrector fabrication are discussed.

Paper Details

Date Published: 13 January 1993
PDF: 11 pages
Proc. SPIE 1751, Miniature and Micro-Optics: Fabrication and System Applications II, (13 January 1993); doi: 10.1117/12.138874
Show Author Affiliations
Sergei T. Bobrov, Lab. of Optical Technology of Electron Devices Mfg. Corp. Svetlana (Russia)
Boris N. Kotletsov, Lab. of Optical Technology of Electron Devices Mfg. Corp. Svetlana (Russia)
Yuri G. Turkevich, Lab. of Optical Technology of Electron Devices Mfg. Corp. Svetlana (Russia)


Published in SPIE Proceedings Vol. 1751:
Miniature and Micro-Optics: Fabrication and System Applications II
Chandrasekhar Roychoudhuri; Wilfrid B. Veldkamp, Editor(s)

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