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Proceedings Paper

Polarization-based phase-shifting method for shape contours
Author(s): Jing Fang; Y. P. Ma; Hong-Min Shi; Xuesong Li; Guoying Wu
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Paper Abstract

A phase shifting technique of changing polarization state in a Twyman-Green interferometer is presented to measure the shape of the object surface. The wavefronts of the reference beam and object beam are orthogonally polarized. They are resolved by a quarter-wave plate and then detected by a polarizer as an analyzer. Four intensity measurements with phase difference associated with polarization variation are used to obtain interferometric phase corresponding to shape contour.

Paper Details

Date Published: 11 December 1992
PDF: 7 pages
Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); doi: 10.1117/12.138803
Show Author Affiliations
Jing Fang, Peking Univ. (China)
Y. P. Ma, Peking Univ. (China)
Hong-Min Shi, Peking Univ. (China)
Xuesong Li, Peking Univ. (China)
Guoying Wu, Peking Univ. (China)


Published in SPIE Proceedings Vol. 1746:
Polarization Analysis and Measurement
Dennis H. Goldstein; Russell A. Chipman, Editor(s)

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