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Proceedings Paper

Mueller matrix measurements with an out-of-plane polarimetric scatterometer
Author(s): Tod F. Schiff; John C. Stover; Donald R. Bjork; B. D. Swimley; Daniel J. Wilson; Mark E. Southwood
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Paper Abstract

This paper reviews a scatterometer capable of measuring scatter throughout most of the sphere surrounding the sample. The instrument can be configured to operate at many different laser wavelengths, or with a broadband source, and at virtually any angle of incidence. Automated polarization control of both source and receiver has been accomplished, which allows calculation of incident and scattered Stokes vectors as well as the Mueller matrix associated with either reflective or transmissive samples. A unique 'no sample' method of instrument calibration and Mueller matrix calculation results in a normalized Mueller noise floor of only +/- 0.003.

Paper Details

Date Published: 11 December 1992
PDF: 12 pages
Proc. SPIE 1746, Polarization Analysis and Measurement, (11 December 1992); doi: 10.1117/12.138799
Show Author Affiliations
Tod F. Schiff, TMA Technologies, Inc. (United States)
John C. Stover, TMA Technologies, Inc. (United States)
Donald R. Bjork, TMA Technologies, Inc. (United States)
B. D. Swimley, TMA Technologies, Inc. (United States)
Daniel J. Wilson, TMA Technologies, Inc. (United States)
Mark E. Southwood, TMA Technologies, Inc. (United States)


Published in SPIE Proceedings Vol. 1746:
Polarization Analysis and Measurement
Dennis H. Goldstein; Russell A. Chipman, Editor(s)

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